Metrology software

07/01/1997

Metrology software

SuperQ is a software package for the PW2800 XRF wafer analyzer. It permits rapid, automatic verification of film thickness, composition, stoichiometry, surface contamination, dopant levels, and uniformity. The GUI interface facilitates surface mapping for all standard wafer configurations from 2 to 12 in. Philips Analytical X-Ray, Almelo, The Netherlands; ph 201/529-6246, fax 201/529-5084.