Cobalt sputtering targets

07/01/1997

Cobalt sputtering targets

Alkaline metal impurities, U, and Th (alpha emitters) are strictly controlled in these ultrahigh-purity (4N5) cobalt sputtering targets. Very low magnetic permeability reduces target interference with the sputter magnet. The thickness of the targets (3 mm) yields longer life than is normal with conventional targets. NIMTEC/Japan Energy Corp., Chandler, AZ; ph 602/732-9857, URL http://www.j-energy.co.jp/product/target