Transport Module for Cluster tool automation platforms

07/01/1997

Transport module for cluster tool automation platforms

The ClusterLink TMC (transport module control) solution is now fully integrated with the Marathon and Hercules cluster tool automation platforms. The software module includes a complete set of maintenance and configuration screens, as well as a library of standard drivers for platform components and optional drivers for smart sensors, RS-232 devices, and factory automation interfaces. Designed with a documented, open interface for easy integration with cluster tool controllers, the TMC features recipe management, alarm and recovery handling, data logging, safety interlocks, self-endurance test and diagnostic routines, program simulation mode, and Windows NT human interface. Brooks Automation (Canada) Corp., Richmond, Canada; ph 604/214-5000, fax 604/214-5001.