Literature
07/01/1997
PPT residual gas analyzer catalog
This six-page, color brochure describes the features and benefits, operation, and specs of a line of partial pressure transducer (PPT) residual gas analyzers (RGAs). The PPT is designed for a variety of applications, including leak detection, high-energy physics, vacuum coating, vacuum heat treating, residual gas analysis, off-gas studies, tube-and-bulb manufacturing, and surface science studies. PPT RGAs combine large control electronics modules into a single, compact electronics control unit (ECU) that mounts directly on a quadrupole sensor flange. The system, consisting only of the quadrupole sensor and ECU, interfaces directly with PC-compatible computers via standard RS-232 or RS-485 communications. MKS Instruments Inc., UTI Division, Walpole, MA; ph 508/975-2350, fax 508/975-0093, e-mail [email protected].
Load lock application notes
These notes highlight the capabilities of a line of motorized and manual load locks, as well as control systems and sample treatment cells that can be incorporated into systems for specialized applications. Motorized load locks provide access to chambers requiring long transfer distances; provide repetitive, reproducible placement; and are suited to applications requiring the movement of large, inaccessible objects. Manual load locks, used to transfer experimental material into an analytical chamber, eliminate the need to vent the chamber to atmospheric pressure, and can handle sample sizes from 350-450 mm. Treatment cells added to instrument load locks enable sample pretreatment prior to analyses, such as heating, cooling, catalysis activation, and oxidizing high-temperature superconductors. Control systems protect manual load lock systems from improper valve sequencing. Surface/Interface Inc., Sunnyvale, CA; ph 408/732-7111, fax 408/732-7191, e-mail sii@surface interface.com.
Specialty gases reference guide
This 428-page guide contains product and technical information on specialty gases. It includes a new line of TechniMate high-purity gases developed in association with leading lab instrument manufacturers that will aid in detector performance and eliminate instrument failure; information on 11 new classes of gas and liquid mixtures that enable the user to match mixture accuracy and performance characteristics to specific application needs; clear definitions of industry terminology for the comparison and selection of gas products; updated safety information to help meet state and federal regulations and to create a safer operating environment; and descriptions of new equipment such as the automatic ChangeOver Regulator System that will reduce contamination and improve system efficiency. Scott Specialty Gases, Plumsteadville, PA; ph 215/766-8861, fax 215/766-2476.
Dielectric capacitor bulletin
This eight-page bulletin (SG-402G) details a line of Filmtrim plastic dielectric capacitors. It incorporates features, specs, and outline drawings of models in 5-mm, 6 x 8 mm, and 10-mm sizes, as well as the high-capacitance range models in 11 x 13 mm and 16-mm sizes. Specs include voltage rating, dielectric withstanding voltage, contact resistance, insulation resistance, torque, and capacitance change with axial load. Sprague-Goodman Electronics Inc., Westbury, NY; ph 516/334-8700, fax 516/334-8771.
Gas phase filter bulletin
This technical bulletin describes AQF 147-type gas phase filters that are effective in removing ammonia from the atmosphere where silicon wafers and microelectronics are produced. Ammonia, typically present at concentrations of 10-15 ppb, is known to poison deep-UV or chemically amplified photoresist processes. It can also react with silicon surfaces to alter the performance and impact production yield. Dynamic adsorption testing has demonstrated that AQF 147 filters have a service life of hundreds of days for ammonia, depending on desired degree of removal. The filters also provide low pressure drop and no dusting. Hoechst Celanese Corp., Filtration Group, Joliet, IL; Contact: Shane Fausel, ph 815/726-4600, fax 815/726-8912, e-mail [email protected].
Fluid dispensing systems brochure
This eight-page, color brochure provides a description of the Century Series automated fluid dispensing systems. Numerous photos and charts detail the range of application, capabilities, and features of these CE-approved, TUV-certified systems. The flexible capabilities, integrated dispensing functions, broad range of fluid delivery systems, and automation options of the series make them suitable for the manufacturer converting from manual processes with low to medium production volume. The series features a 12 x 12 in. or 18 x 18 in. display area, X-Y placement accuracy, back EMF valve control for consistent dispensing viscosity, improved I/O, and programmable software. Options include a vision system for programming, automatic fiducial locator system, dual-action dispensing head, heated work surface with vacuum part hold-down, height sensor, needle sensor, and needle heater. Asymtek, Carlsbad, CA; Contact: Roberta Foster-Smith, ph 760/431-1919, fax 760/431-2678, e-mail [email protected].
CMP slurry distribution and dispense videocassette
This animated, four-min videocassette (CMP 200) titled Pall Filtration Systems for Distribution and Dispense of CMP Slurries highlights Profile and Ultipleat Profile, all-polypropylene filter cartridges for chemical mechanical polishing (CMP) slurry distribution systems. The filter cartridges remove oversize particles or aggregates present in CMP slurries to minimize microscratches and gouges that may result from contaminated slurries. Profile depth filters have a tapered pore structure, providing built-in prefiltration and long filter life, and are available in sizes and configurations for all flow rates and slurries. The filter elements do not release particulate or fibrous material, nor will they unload captured elements. A flow diagram is included to guide the viewer through the optimal filtration scheme for CMP slurry distribution systems. Also illustrated are Kleen-Change 100 filter assemblies, sealed capsules with low hold-up volume for bulk distribution loops and point-of-use, and PCY Series Housings, standard polypropylene housings with replaceable filters for small to medium flow rates. Pall Corp., Port Washington, NY; ph 800/289-7255 or 516/484-3600, e-mail [email protected], URL http://www.pall.com.
PWB designer certification study guide on CD-ROM
This CD-ROM titled PWB Design Principles Study Guide prepares printed wiring board (PWB) designers for the Designers Certification exam. It covers all the topics a designer needs to know to become certified: design considerations, layout principles, component and assembly issues, printed board characteristics, and documentation and dimensions. It also covers all the objectives for each of the ten sections of the PWB exam, including electrical considerations, material properties, board fabrication, testing technology, and reliability. The opening screen features subwindows that, when selected, describe the structure of the study guide and certification program, as well as what reference materials were used to develop them. The main body of text covers the subject area in a storybook fashion, with technical terms highlighted to provide a hyperlink or direct contact to the comprehensive glossary of terms. This dictionary comes directly from the IPC-T-50, the industry standard for terms and definitions. Institute for Interconnecting and Packaging Electronic Circuits (IPC), Northbrook, IL; Contact: Gary Ferrari, ph 500/346-4360.
1997 vacuum products catalog
This 266-page catalog contains detailed information on a line of products for vacuum generation, measurement, and control. Products covered feature a range of pumps, including turbomolecular; UniDry dry backing; rotary vane; Roots and diaphragm; components such as flanges, fittings, feedthroughs, and valves; total pressure gauges and control units; helium, dry, and multigas leak detectors; residual gas analyzers; gas analysis components, accessories, and Quadstar software; process monitoring modules; gas analysis systems; and laboratory coating systems. Also described is the Rotary Vane series with integrated magnetic coupling for oil-free performance (DUO 005 and DUO 010M); a complete series of magnetically suspended bearing turbodrag pumps for corrosive processes; turbo on-board controller, a modular and flexible integrated drive unit; a process ion gauge; and the MaxiGauge controller for monitoring up to six gauges. Pfeiffer Vacuum Technology Inc., Nashua, NH; ph 603/578-6500, fax 603/578-6550.
Chip resistor and attenuator information
This literature describes a line of chip resistors for solder, wire bonding, and epoxy attachment. Included are specs for Surface Mount Microwave 26 GHz and very low-value chip resistors from 0.022 ?, as well as for 10 GHz, thin-film attenuators. Sizes range from 0.030 x 0.020 in. to 0.36 x 0.14 in. Available resistance values range from 0.022 ? to 2000 Gig ? and power ratings up to 10 W. Engineering kits are also described. International Manufacturing Services Inc., Portsmouth, RI; ph 401/683-9700, fax 401/683-5571.
Vacuum valve catalog
This 192-page, hardcover catalog includes a range of vacuum valves, control systems, accessories, integrated valves for OEM applications, and retrofit valves for existing systems. The source book provides complete technical specs for applications ranging from rough vacuum to UHV. New products include miniature gate valves, low-cost all-metal angle valves, and heated valves. It also features a guide to help readers select valves according to vacuum levels, and is organized by the type of valve or control unit. Cross-referenced by application, it includes a new section of coated valves for CVD and plasma etch systems. Details of the manufacturers` engineering, assembly, and global support operations are provided. VAT Inc., Woburn, MA; ph 617/935-1446, fax 617/935-3940, e-mail [email protected], URL http://www.vatvalve.com.
1997 vacuum gauge catalog
This 32-page catalog describes diaphragm, pirani, and thermocouple-type vacuum gauges. These gauges measure vacuum and pressure from 10-5 torr to 1500 torr or 30 in. Hg to 100 psig. Calibrations in other units such as mbar and pascal are also available. The gauges include as standard such features as large digital displays, linear analog outputs, sensors of all stainless steel, and bench or panel mounting. Optional features include adjustable set points with relays for control and sensor cables up to 500 ft in length. Vacuum Research Corp. (VRC), Pittsburgh, PA; ph 412/261-7630, fax 412/261-7220.
Probing systems brochure
This brochure titled The Alessi Probing Systems for Failure Analysis and Parametric Measurements describes the REL-6100 and REL-4800 series probe stations` precision, submicron probing capability, and measurement performance. The brochure also details the systems` measurement capabilities in such applications as liquid crystal analysis, emission microscopy, device backside observation, hot-carrier-induced gate leakage, and high-temperature device characterization. The brochure`s center spread illustrates a complete MicroChambered REL-6100 Probing System. Cascade Microtech, Beaverton, OR; ph 503/626-8245, fax 503/626-6023.
Miniature fluid power products catalog
This catalog describes miniature leak-tight fittings, valves, cylinders, tubing, quick disconnects, and pressure regulators. The miniature compression fittings and other stainless steel fittings are of particular interest to designers and users of semiconductor production machinery. Also included are descriptions of new products such as a M6 to 10-32 adaptor; a miniature pressure gauge; coiled polyurethane tubing; tamper-proof fixed orifice flow control valves; and an ultraminiature M3 threaded swivel elbow fitting. Beswick Engineering Co. Inc., Greenland, NH; ph 800/354-5014 or 603/433-1188, fax 603/433-3313, e-mail [email protected], URL http://www.beswick.com.
CSP manufacturing cost report
This report features a cost analysis of material, labor, and equipment depreciation and maintenance for the production of several types of CSPs-packages with laminate substrate, flex circuit, and ceramic substrates. The analysis, done with Dow Chemical`s Envision Cost Model Program, allows manufacturers to compare the cost structure of different packages. Manufacturing costs for laminate CSPs with flip chip inside are examined at 48, 100, 150, 200, and 240 ball counts using a detailed series of assumptions. Ceramic interpose CSPs are considered at the same package ball counts using a stud bump bonding process. Flex circuit interpose packages such as the Tessera ?BGA and the Micro Star BGA are also examined. Factors that influence the relative cost of each package are detailed, as are board-level costs, system-level costs, industry infrastructure, and progress in socket for test and burn-in, PCBs, and board-level contract assembly. TechSearch International Inc., Austin, TX; 512/343-4508, fax 512/343-4509.
Thermal convection mass flow meter booklet
An eight-page booklet titled "Theory and Application of Kurz Thermal Convection Mass Flow Meters" discusses the properties of constant temperature anemometers (CTAs) used in the semiconductor process industry for small, clean gas flows with modest flow and temperature ranges and turn-down ratios. Topics include CTA sensor circuitry, heat transfer equations, effect of fluid properties, time response to flow and temperature changes, and orientation effects. An introduction to types of thermal convective mass flow elements, mass flow computers, and typical applications is also provided. Kurz Instruments Inc., Monterey, CA; ph 800/424-7356, fax 408/646-8901, e-mail [email protected], URL http://www.kurz-instruments.com.