Spatial pattern recognition software

07/01/1997

Spatial pattern recognition software

Spatial Pattern Recognition (SPaR) software analyzes and identifies defect distribution characterisitics on wafers. With SPaR, engineers can import wafer map data generated by standard inspection tools, re-image them, and automatically sort defect patterns into unique, classified "signatures." These signatures can then be correlated to process events such as machine scratches or resist streaks, using a library of identified signatures. Users can thus relate specific defect shapes or patterns to process-related causes in real time. Knights Technology Inc., Sunnyvale, CA; ph 408/988-0600, fax 408/739-4438.