vertical Firnace

07/01/1997

Vertical furnace

The RVP Series 9000 is an advanced vertical furnace that accommodates rapid temperature ramping, minibatch economics, and flexibility for processes such as gate oxides, drive-in anneals, and thin LPCVD films. Series 9000 couples batch economics with process and throughput performance rivaling RTP tools for thin films - oxides, polysilicon, and silicon nitrides. The small-batch, fast-ramping system reduces overall process time, cost of ownership, and thermal budget. Silicon Valley Group Inc., San Jose, CA; ph 408/467-5847, fax 408/467-5867.