Film Metrology with minienvironment

07/01/1997

Film metrology with minienvironment

The NanoSpec 8000XSE-MV is a thin-film analyzer that nondestructively and automatically measures single and multiple thin-film layers on wafers up to 200 mm, using combined spectrophotometry and spectroscopic ellipsometry. In addition to film thickness, the optical constants of film materials can be determined. The tool features a SMIF pod and wafer-transport system, as well as a minienvironment enclosure. This configuration maintains wafers in an ultraclean environment while relaxing fab cleanliness requirements. Nanometrics Inc., Sunnyvale, CA; ph 408/746-1600 ext 103, fax 408/720-0196, e-mail [email protected].