Thin Film Metrology

07/01/1997

Thin film metrology

The Opti-Probe 5000 system features seamless integration of several measurement technologies: spectroscopic ellipsometry; absolute ellipsometry (for accurate and repeatable measurement of the thinnest layers); spectroscopy; beam profile reflectometry; and beam profile ellipsometry (offering very high throughput and a 0.9-?m spot size). The integration of these technologies, plus powerful DUV t, n, and k modeling down to 190 nm, transparent migration of recipe setups from previous Opti-Probe models, and very good uptimes, make the 5000 well-suited to use in the fab. Therma-Wave, 510/490-3663, fax 510/656-3852, e-mail [email protected].