RT-CVD

07/01/1997

RT-CVD

This rapid thermal chemical vapor deposition (RT-CVD) system, IntegraPro, is designed for the manufacture of 64-Mbit DRAMs and advanced microprocessors, and for 256-Mbit device development. Processing capabilities include in-situ cleaning, thermal and CVD dielectrics, CVD polysilicon, and selective HSG. IntegraPro integrates Brooks Automation`s wafer handler with MESC-compatible wafer-surface preparation and RT-CVD modules. The system offers good cost of ownership with minimal queue time, under an ultraclean, reduced pressure environment. AGI Inc., San Jose, CA; ph 408/935-2825, fax 408/935-2715.