Microcleaving system

07/01/1997

Microcleaving system

The MC 200 microcleaving system is dedicated to ultraprecise cross-section preparation of the highest quality for the purpose of failure analysis and process monitoring. The PC-based system features a single die cross-section preparation kit and is easily operated by fab personnel. The microcleaving process generates two mirror-image sections through the defect or feature in <10 minutes. This accessibility, together with high throughput, reduces the diagnosis cycle for fault analysis. SELA, Santa Clara, CA; ph 408/988-5151, fax 408/988-3322, e-mail [email protected].