CMP Cleaning tool

07/01/1997

CMP cleaning tool

Synergy Integra is an integratable version of the Synergy cleaning system, which performs mechanical brush scrubbing and in-situ chemical etching simultaneously in a single system. Integra`s open architecture platform is designed for integration with CMP polishing systems from various suppliers, providing a completely automated polishing and cleaning solution. Its one-step process gives high throughput andlow cost of ownership for a number of critical CMP cleaning applications. OnTrak Systems Inc., San Jose, CA; ph 408/952-5633, fax 408/952-5645.