UV Inspection microscope

07/01/1997

UV inspection microscope

The Axiotron 2 UV microscope extends the limits of resolution by expanding the spectral range into the deep UV. Already a state-of-the-art high-resolution optical microscope, its imaging spectral range has been increased down to 248 nm, doubling the instrument`s resolution capabilities. This ergonomic, fully automated inspection tool allows high-magnification, high-quality imaging optimized at 365 nm (UV) and 248 nm (DUV), shedding new light on semiconductor inspection, review, and failure analysis, not only through higher resolution but through new image contrasting, due to interaction of UV illumination and the sample`s optical constants. Carl Zeiss Inc., Thornwood, NY; ph 800/982-6493, fax 914/681-7446, e-mail [email protected], URL http://www.zeiss.com.