CD SEM

06/01/1997

CD SEM

The S-8840 CD-measurement SEM uses a flashless electron source to provide 40-? resolution at an operating voltage of 800 V, eliminating charging and ensuring proper imaging and measurement. The automated CD-measurement function is facilitated by wafer alignment via an optical microscope and a real-time auto-focus system. A new loadlock system and a rapid stage drive contribute to the instrument`s 26-wafer/hour throughput. Simple operation is based on a user-friendly GUI, allowing intuitive management of CD measurements, plus versatile user-programmable and selectable recipe programs. The S-8840 is suited to applications ranging from high-volume production metrology to R&D quality control. Hitachi Scientific Instruments/Nissei Sangyo America Inc., Mountain View, CA; ph 800/227-8877, e-mail [email protected], URL http://www.nissei.com.