Transparent film metrology

06/01/1997

Transparent film metrology

The VANGUARDSpectralLASER 200 XL metrology system uses lasers at 458, 633, 780, 905 nm and a DUV reflectometer to give accurate, repeatable results on thick and thin transparent films in CMP, CVD, diffusion, etch, and lithographic applications. The multi-angle, multi-wavelength system provides unambiguous t, n, k, and - with the addition of the DUV reflectometer - complete characterization of ARC and BARC films at the 365-, 248-, and 193-nm UV exposure wavelengths. The use of four lasers, covering the spectrum from deep blue to infrared, allows the system to measure up to six parameters on complex film stacks. Other system specifications are: laser lifetimes of 20,000-30,000 hours; reflectometer spot size of 30 ?m; repeatability better than 0.01%; and 0.5% accuracy on thick and thin films. Rudolph Technologies Inc., Flanders, NJ; ph 201/691-1300, fax 201/691-5480.