Water surface analysis sytem

06/01/1997

Wafer surface analysis system

AST Products introduces VCA-3000 wafer surface analysis systems as the latest addition to the Video Contact Angle product line designed for characterizing 100- and 200-mm wafer surfaces. Entirely self-contained, the VAC 3000 incorporates computer imaging capability with contact angle measurement to analyze surface energy characteristics used to determine surface cleanliness and coating uniformity and quality. A liquid droplet is precisely positioned on the wafer surface by a motorized syringe system. The imaging software then automatically analyzes the shape of the drop to determine the properties of the first monolayer. The unit includes a Pentium-based computer, motorized syringe and stage assembly for wafer viewing, along with automatic contact angle calculation software. AST Products Inc., Billerica, MA; ph 508/663-7652.