Integrated vacuum cluster tool platform

06/01/1997

Integrated vacuum cluster tool platform

Equipe Technologies has announced the shipment of its new integrated vacuum cluster tool platform for high-volume production and testing of semiconductor wafers. The Equipe cluster tool platform centers around the VAC 400 Direct Drive Robot integrated with the VXR Magnetically Coupled Indexer/Load-locks, VPR Pre Aligner, and ESC 300 Transport Module Controller. The system`s modular design is available in standard 4- through 8-sided configurations and features an optional custom-designed vacuum pumping system. All platforms are MESC compliant and fully compatible with SMIF and AGV factory automation requirements. Equipe Technologies, Sunnyvale, CA; 408/522-0350.