SMIF enclosure
06/01/1997
SMIF enclosure
This company has created a Class 1 SMIF enclosure for its fully automated CV/IV system for high volume, front-end electrical testing of semiconductor wafers. The optional SMIF enclosure requires a minimum amount of space and is fully integrated with the SSM 5200 system. Compatible with new-generation fabs, it offers better environmental control for wafer testing and is ideal for ion implant, gate oxide diffusion, and dielectric monitoring. Solid State Measurements Inc., Pittsburgh, PA; ph 412/787-0620.