Critical dimension atomic force microscope

06/01/1997

Critical dimension atomic force microscope

Veeco Instruments offers the Dektak SXM Critical Dimension Atomic Force Microscope (CD-AFM), an in-line metrology tool that provides noncontact, nondestructive measurements, enabling expensive production wafers to be tested without damage. Operable in both cleanroom and ambient conditions, the CD-AFM provides in-line metrology for linewidths, heights and sidewall profiles of trenches as small as 0.25 micron and below. Proprietary scanning and probe tip technologies enable the CD-AFM to profile vertical and re-entrant features in three dimensions. The Dektak SXM can make measurements anywhere on wafers up to 200 mm without sectioning, coating, or destroying the sample. Veeco Instruments Inc., Plainview, NY; ph 516/349-8300.