SEM monitor workstation

06/01/1997

SEM monitor workstation

Spectel announces the availability of the SEM Monitor, a diagnostic tool known as "Sharpness Analysis," integrated into a turnkey workstation to meet the semiconductor industry`s need for analysis of production metrology scanning electron microscopes (SEMs). The tool`s analysis capability was developed for use as an on-line instrument diagnostic and for tool-matching in a production environment. It provides a quantitative framework based on fourier transform feedback for monitoring SEM resolution, astigmatism, and image quality over time and for comparing it to other instruments. Information from the software analysis can then be used to adjust the SEM for optimum performance. In addition to the SEM Monitor software, image processing software and Spectel`s Metrologia electron beam and optical simulation software and characterization capabilities have been incorporated into the workstation. Spectel Research, Mountain View, CA; ph 415/254-0532.