SEM monitor sharpness analysis system

06/01/1997

SEM monitor sharpness analysis system

SEM Monitor Sharpness Analysis is a diagnostic tool for evaluation of SEM-based metrology systems. The analysis capability was developed for use in on-line instrument diagnostics and tool matching in a production environment. It provides a quantitative framework based on Fourier transform feedback for monitoring SEM resolution, astigmatism, and image quality over time and as compared to other instruments. Information from the software analysis can be used to adjust a SEM for optimum performance. SEM Monitor has been integrated into a turnkey workstation that incorporates additional electron beam and optical modeling and characterization capabilities. Spectel Research, Mountain View, CA; ph 415/254-0532, fax 415/254-0437, e-mail [email protected].