FIB system

06/01/1997

FIB system

The 9500IL focused ion beam system can be used in the fab to produce cross-sectional images and material analysis of defects and critical process steps. Due to its stainless steel enclosure and automatic wafer handler, the 9500IL provides timely data to process engineers without removal of the wafer from the fab line. Micrion Corp., Peabody, MA; ph 508/531-6464, fax 508/531-9648.