Pendulum valve

06/01/1997

Pendulum valve

The Series 65 pendulum valve, for downstream pressure control and isolation, features fast, almost particle-free control operation and is well suited to harsh environments such as corrosive etch and CVD applications. The valves offer easy access for cleaning. Bolt-on flange options for direct chamber attachment allow a simple integration on process tools. An integrated heater, for uniform temperature control up to 150?C of valve body and pendulum plate, assures extended operating intervals between maintenance. Available dimensions range from DN 63 to DN 320 and include all standard flange types. VAT Inc., Woburn, MA; ph 617/935-1446, fax 617/935-3940, e-mail [email protected].