PFC recovery and recycle system

06/01/1997

PFC recovery and recycle system

PFCs such as C2F6 and CF4 are used extensively in CVD and etch processes, and concerns about global warming necessitate reduction of such gases. This system first treats tool exhaust to remove reactive and corrosive gases; then, gas separation technology separates the large amount of nitrogen in the tool exhaust from the PFCs. The concentrated PFC mixture can then be shipped for recycling. For large fabs, an on-site, dedicated PFC purification system can be provided. Air Products and Chemicals Inc., Allentown, PA; ph 610/481-4986, fax 610/481-6642.