Aluminum planar target

06/01/1997

Aluminum planar target

SOLO is a low-profile aluminum target, designed for one-piece monolithic semiconductor applications, which features a homogeneous and consistent fine grain size, as well as optimized crystal orienta-

tion. Nondestructive testing ensures consistent performance target to target, and throughout target life. SOLO is available in homogenized CP 2 process aluminum and premium low-defect grade aluminum. It allows for higher power operation and throughput than traditional solder-bonded assemblies. The all-aluminum target provides improved cooling at high powers and the micro surface finish results in quicker burn-in. Tosoh SMD Inc., Grove City, OH; ph 614/875-7912, fax 614/871-9542.