CMP slurry filtration

06/01/1997

CMP slurry filtration

The CMP Kleen-Change 100 filter assembly series, for the filtration of metal and oxide CMP slurries, is a range of completely encapsulated, disposable polypropylene filter units designed to eliminate filter housing cleaning, reduce potential contamination, and minimize contact with the process slurry. The assemblies can be installed easily at mixing stations, in distribution loops, and at polishing tools. They contain a polypropylene filter medium available in a range of 5-120 ?m absolute rating, and a variety of assembly sizes ensures optimum contaminant removal in specific polishing applications. Pall Corp., Port Washington, NY; ph 516/484-3600 or 800/289-7255, e-mail [email protected], URL http://www.pall.com.