300-mm wafer platform

06/01/1997

300-mm wafer platform

The Microglide T350 air bearing motion platform, designed to accommodate 300-mm wafers, is made from materials such as ceramic, granite, and aluminum, providing high precision and stiffness. Specifications include: 450 ? 350-mm travel; 0.04-0.01-?m resolution (feedback dependent); 0-500-mm/s velocity range; 2.5-5 m/s2 acceleration range; ? 0.5-0.75-?m/40 mm accuracy; 3s bi-directional repeatability of ?0.5-?0.1 ?m; ?0.5 ?m/100 mm flatness of travel; ?0.5 ?m/100 mm straightness of travel; ? 1 arc-sec orthogonality; and ? 1 arc second pitch and yaw. Anorad Corp., Hauppauge, NY; ph 516/231-1995, fax 516/435-1612, URL http://www.anorad.industry.net