Critical etch systems

06/01/1997

Critical etch systems

The 6500 series high-performance critical etch systems use low-pressure HRe technology for applications such as selective nitride and shallow trench (isolation etch technology), polysilicon, and silicide (6510); metal etching with rinse-strip-rinse corrosion control (6520); and Pt, PZT, and a variety of emerging films (6540). Tegal Corp., Petaluma, CA; ph 707/763-5600, fax 707/765-9311.