Polishing and planarization tool

06/01/1997

Polishing and planarization tool

MECAPOL E550 is a CMP tool that is equipped with an in-line scrubber and endpoint system. It offers high throughput and good MTBF and MTTR. PRESI SA, Brie et Angonnes, France; ph 33/47672-0021, fax 33/47672-0584.