Plasma etch processing system

06/01/1997

Plasma etch processing system

The Beta 150 plasma etch processor is a single-wafer, cassette-to-cassette system, whose main chamber can be configured for plasma or RIE etch processing, and can accommodate wafer sizes from 100 to 200 mm. The Dual Loadlock system offers the user additional processing capabilities and good contamination control. Beta Squared Inc., Allen, TX; ph 972/889-6408, fax 972/889-6411.