Blending system for post-CMP clean

06/01/1997

Blending system for post-CMP clean

MEGAblend 1100PV, for dilute NH4OH and HF, is a precision blending system that complements the new generation of post-CMP clean scrubbers. Blending two chemicals and DI water, the 1100PV combines the performance of pumps with the purity of pressure vessels, complementing this company`s slurry distribution technology to provide a complete CMP package. MEGA Systems & Chemicals, Chandler, AZ; ph 602/437-9105, fax 602/437-2613.