Wafer-marking system

06/01/1997

Wafer-marking system

The WaferMark SigmaXC features 300-mm wafer-handling capability with a mini-environment. The system is integrated with a handler that accepts 300-mm wafer pods. Featuring a highly stable diode pumped Nd:YLF laser, the system includes SuperSoftMark for debris-free laser scribing. WaferMark SigmaXC is fully self-contained, and no external cooling source is required. Lumonics Inc., Oxnard, CA; ph 805/981-9434 ext 4397, fax 805/485-3335.