Maglev hybrid turbomolecular pumps

06/01/1997

Maglev hybrid turbomolecular pumps

The ATH 400M and ATH 1000M maglev hybrid turbopumps are maintenance-free and battery-free, and are designed for etch processes, ion implantation, sputtering, and plasma deposition. The pumps feature: five active axes, the most reliable magnetic bearing technology; an automatic balancing system for rotor imbalance compensation; an integrated heating device to eliminate the condensation of by-products; an inverted dynamic seal to protect the magnetic bearing chamber; and inert gas purge. Specifications for the 400M and 1000M are, respectively, 400 and 1000 liters/sec range nitrogen pumping speed, 10-9 mbar ultimate pressure, and up to 2000 sccm gas throughput at 1 mbar continuous inlet pressure. Alcatel High Vacuum Technology, Annecy, France; ph 33/45065-7875, fax 33/45065-7644.