Maskmaking tools

06/01/1997

Maskmaking tools

ZBA series maskmaking tools feature shaped beam, vector scan, continuous moving stage technologies for high resolution and placement accuracy without compromising throughput. With the ability to pattern advanced OPC and PSM structures, the systems use SMIF-based autoloading, avoiding all operator contact with the critical masks. With 9-in. substrate capacity, the ZBA series will have application for several design generations to come. Leica Inc., Deerfield, IL; ph 800/909-3935, fax 201/236-5917.