Microlithography handbook

06/01/1997

Microlithography handbook

This 776-page volume titled Handbook of Microlithography, Micromachining, and Microfabrication: Volume 1, Microlithography covers all aspects of microlithography as applied to microelectronics. Topics include optical, electron beam, and x-ray lithography; deep-UV resist technology; photomask fabrication procedures and limitations; metrology methods in photolithography; optical lithography modeling; and issues in nanolithography for quantum effect device manufacture. Written by experts in the field, the handbook also contains process details, recipes, tables, and charts. ISBN 0-8194-2378-5. Price: $90 (SPIE member), $100 (WG member), $110 (nonmember). SPIE, Bellingham, WA; ph 360/676-3290, fax 360/647-1445, e-mail [email protected].