ion implanter refurbishment program

06/01/1997

Ion implanter refurbishment program

This factory refurbishment program rebuilds and upgrades medium- and high-current ion implanters for resale to fabs. Implanters are upgraded with model-specific, current technologies in ion sources, dosimetry, and wafer handling and are warranteed. Included in the program are the 300XP (75-150 mm) medium-current implanter introduced in 1986, and the models 80XP, 120XP, 160XP, and 180XP (1-150 mm) high-current ion implanters. Refurbished 300XP implanters have solid-state scan amplifiers with air-cooled operation for dose reproducibility and uniformity. Upgraded high-current implanters feature a source turbopump upgrade and Revision E software.Varian Semiconductor Equipment, M/S H-105, 3045 Hanover St., Palo Alto, CA 94303; URL http://www.varian.com.