Issue



Literature


06/01/1997







Semiconductor training products brochure

This brochure describes a line of training products designed to meet the needs of IC manufacturers and their suppliers. Seminars, videos, and printed materials cover topics like IC manufacturing, cleanroom technology, maskmaking, and chip packaging. Also included is information on the 1997 release of the industry resource books Microchip Fabrication and Semiconductor Terminology. Semiconductor Services, Redwood City, CA; ph 415/369-7890, fax 415/367-1062, e-mail [email protected].

Process tubes brochure

This brochure describes a line of quartz glass tubes that are compatible with all front-end processes and are an alternative to silica carbide. The HSQ 400 tubes are thermally stable, homogeneous, transparent, and pore-free. They also offer chemical resistance and are able to withstand temperatures up to 1280?C. Stabilization, viscosity, and recommendations are discussed. Heraeus Amersil Inc., Duluth, GA; ph 770/623-6000, fax 770/623-5640.

Precision cleaning systems brochure

This eight-page, full-color brochure details ultrasonic and spray-under immersion cleaning systems for cleaning semiconductors, optics, disk drive components and media, and precision machined parts. Several product lines are described, including sweepSONIK 2 generators that provide sweeping frequency ultrasonics to eliminate damaging standing waves; sweepSONIK 2D with DualSWEEP technology that sweeps the sweep rate

to eliminate low-frequency resonance; ProSONIK 2 generators that offer control of different wave characteristics; ULTRAsonik benchtop cleaning units; and enviroSONIK multistation systems that incorporate modular clean, rinse, and dry stations in various combinations for use with all available cleaning chemistries. Also described is the Torrent automated, single-chamber wash, rinse, and dry system. Ney Ultrasonics, Bloomfield, CT; ph 800/962-8822 or 860/286-6149, fax 860/286-6150.

Sealing clip brochure

This brochure describes a line of clips used in semiconductor assembly for lid/package sealing in ovens or belt furnaces. The clips can be used on CQFP (J, U, and SOJ types), chip carriers (leaded and leadless), PGA (cavity-up and cavity-down), and side-braze packages. They are available in a number of sizes with numerous options, including length, width, jaw depth, and force. Electro Assembly Source Inc., Greensburg, PA; ph 412/838-7023, fax 412/838-7025.

Trace ion analysis brochure

This full-color brochure highlights technology, applications, and instrumentation for high-purity water analyses in the semiconductor industry. Topics include the identification and elimination of ionic contamination during the fabrication process; trace analysis of materials such as molding compounds and polymeric adhesives; and analysis of trace levels of conta- minants in semiconductor pure water, chemicals, and process water. In addition, the DX 500 ion chromatography system, the DX-120 ion chromatograph, and the Dionex process analyzer are described in detail. A description of automation capabilities for productivity and data management is also provided. Dionex Corp., Sunnyvale, CA; ph 408/737-0700, URL http://www.dionex.com.

Hydrogen monitoring system brochure

This six-page, color brochure describes the 20-point Hydrogen Monitor (H2M) for gas monitoring in semiconductor plants. The brochure diagrams and explains the H2M`s acoustic sensing technique that tests air for hydrogen with pulses of ultrasound, and discusses the system`s Getter Validation technique for eliminating interference and preventing false alarms. Differences between conventional sensors and the H2M are explained. The brochure also outlines system features and specs such as detection sensitivity down to 100 ppm from up to 1000 ft away. TeloSense Corp., Fremont, CA; ph 510/490-2087, fax 510/490-6485, e-mail [email protected], URL http://www.telosense.com.

Process monitor brochure

This eight-page, color brochure highlights the QualiTorr Orion series of quadrupole mass analyzer-based process monitoring systems for PVD, CVD, and etch. The brochure describes systems design, performance, and process monitoring software, and provides examples of how to find and solve process problems. System features such as calibration for tool-to-tool repeatability and management to prevent unnecessary downtime are also detailed. MKS Instruments Inc., Andover, MA; 800/227-8766 or 508/975-2350, fax 508/975-0093.

Pneumatic drive pump brochure

This 16-page brochure describes a line of pneumatic drive pumps and accessories designed for wet-process and surface-preparation systems used in the semiconductor industry. These F series acid recirculation pumps are chemical and temperature resistant and deliver liquids over a wide range of operating temperatures. Included in the brochure are detailed descriptions of pumps like the nonmetallic FZ-20T pump and the CFD-8TW chemical dispensing pump. Cross-sectional and dimensional artwork, photographs, and performance curves are also provided to aid in pump selection. Iwaki Walchem Corp., Holliston, MA; ph 508/429-1440, fax 508/429-1386.

On-line metrology diagnostics literature

This literature describes the SEM Monitor Sharpness Analysis System, a turnkey workstation for real-time evaluation of SEM-based metrology systems. The Sharpness Analysis System enables instrument diagnostics and tool matching. Additional modeling and characterization capabilities for electron-beam and optical systems are incorporated in the application software. Spectel Research, Mountain View, CA; 415/254-0532, fax 415/254-0437, e-mail [email protected], URL http://www.spectel.com.

Vacuum robot brochure

This four-color brochure provides information on direct drive vacuum robots for semiconductor processing equipment and other applications requiring ultraclean environments. The Smart Vacuum Robotics (SVR) series offers a reliability more than 10 ? that of other systems (10,000,000 mean cycles between failures) and a high-speed wafer exchange 10-30% faster than timing-belt or gear-driven robots. The three-axis robots facilitate thethroughput of semiconductor cluster tools and have a small direct drive footprint for drop-in replacement of current 200-mm process and cluster tools (SVR200) and 300-mm space-efficient applications (SVR300). Smart Machines, San Jose, CA; ph 408/324-1234, fax 408/324-1966.

Vibration solutions catalog

This 19-page, color catalog describes a line of active and pneumatic vibration solutions products designed to control vibration, shock, and noise problems in the semiconductor and precision measurement industries. The catalog includes information on the STACIS 2000 active piezoelectric vibration control system that controls vibrations within six degrees of freedom with isolation starting at 0.3 Hz; the Electro-damp active electropneumatic vibration control system; the VIP electropneumatic height control system; the Serva-Levl low-frequency pneumatic vibration isolation system; the Stabl-Levl elastomeric pneumatic vibration isolation system; and the Serva-Bench pneumatic vibration isolation workstation. An application matrix for guidance in selecting systems for specific applications is also included. Barry Controls, Brighton, MA; ph 617/787-1555, fax 617/254-7381.

Pressure and flow dimension guide

This 28-page guide features a line of instruments for precise measurement and control of vacuum pressures and gas flows. The guide includes selection charts and dimensional information for each of the instruments. Also described are optional features and accessories for specific tools. Tele-dyne Brown Engineering, Hastings Instruments, Hampton, VA; ph 800/950-2468, fax 757/723-3925, e-mail [email protected], URL http://www.tbe.com/products/hastings/hastings.html.

Optical profiler brochure

This eight-page, color brochure describes the NT-2000 surface metrology system for process analysis and control. The system provides process analysis by combining advanced interferometric technology with full automation for noncontact, 3-D surface dimensions down to 0.1 nm. Additional features are highlighted in the brochure, including the system`s in-line production capabilities and advanced data analysis. The brochure also contains 2-D and 3-D images that illustrate product applications, benefits, and specs. WYKO Corp., Tucson, AZ; ph 800/306-9950 or 520/741-1297, fax 520/294-1799, e-mail [email protected], URL http://www.wyko.com.

Heat sink solutions catalog

This catalog describes heat sinks for cooling CPU, ASIC, and SRAM electronic packages. They are designed to maximize heat transfer while keeping air pressure loss to a minimum. The catalog contains specs and information on standard plate fin, pin fin, elliptical, and fan heat sinks. Other sections include details on clip series, custom large enclosures, and chip-specific heat sinks. A Cross Reference Guide lists heat sinks by width, length, fin style and tip clearance. Intricast Co. Inc., Santa Clara, CA; ph 408/988-6200, fax 408/988-0683.

1998 laser gas and equipment catalog

This color catalog contains specs on excimer laser gas mixtures for microlithography: deuterium, krypton, neon, xenon, helium-3, and other stable isotopic gases. Related gas handling equipment such as safety gas cabinets, scrubber units, gas delivery panels, gas monitors and detectors, and "oil-free" vacuum pumps is also highlighted. Spectra Gases, Irvington, NJ; ph 800/932-0624, fax 201/372-8551.

Electron-beam processing book

This idea book titled "You Dream It, We`ll Beam It" is a guide for designers and materials engineers and suggests a variety of ways that electron-beam processing can be used to improve thermoplastics and elastomers. Electron-beam processing can enhance existing properties, achieve new ones, solve application problems, and replace expensive compounds with commodity plastics. Methods used to improve plastics include cross-linking, chain scission, and other polymer reactions. E-BEAM Services Inc., Cranbury, NJ; ph 609/655-7460, fax 609/655-3052.