Clarifications
05/01/1997
Clarifications
In the ISI/Lucent Technologies World News report (March, p. 22), the e-beam system is capable of printing features =0.1 microns. In "Four steps to a healthier vacuum system" (March, p. 63), the co-author`s name should have been spelled Lise C.H. Laurin. In "Optical lithography in the new millennium" (March, p. 75), Powell Consulting`s address should have read PO Box 4360, Foster City, CA 94404. In World News (April, p. 20), Topcon Technology Inc.`s web address should have read http://www.topcon.com/tti~1.htm.