Nanometrics Inc.

05/01/1997

The Japanese SELETE consortium has selected Nanometrics Inc., Sunnyvale, CA, to supply a NanoSpec 8300XSE thin-film metrology tool for 300-mm development work. The same tool has also been selected by the International 300-mm Initiative (I300I), Austin, TX. The NanoSpec 8300XSE has a wide range of capabilities for both 200- and 300-mm wafers; it offers precise film thickness measurement and optical property characterization of single and multiple transparent film stacks.