GaSonics International

05/01/1997

GaSonics International, San Jose, CA, has shipped a performance enhancement platform 3510C tool to its Japanese Technology Center in Tokyo, which is located at the facility of GaSonics` Japanese distributor, Seki Technotron. The system is configured with photoresist removal and post-etch clean modules, and has been production qualified for 0.25-}mum device manufacturing at 10 strategic semiconductor manufacturers, including two major customers in Japan.