Spincoat unit

05/01/1997

Spincoat unit

Model 100FX spincoat unit features accuracy and repeatability that eliminate processing variability from photoresists, polyimides, and other processing chemicals. It is fully programmable for 300-mm substrate processing. Specifications are: spin range of 0-3000 rpm; acceleration of 1-2000 rpm/sec, depending on spin chuck configuration; 10 steps/program; repeatability of ?5 rpm; and resolution of 1 rpm. Options include auto dispense, backside rinse, and captive spin chuck. Brewer Science Inc./Cee Div., Rolla, MO; ph 573/364-0300, fax 573/364-9513.