SVG Litho, NASA enter optical collaboration

05/01/1997

SVG Litho, NASA enter optical collaboration

With an eye toward improving manufacturing processes at its optical fabrication operation, SVG Lithography has entered into a collaborative effort with NASA`s Goddard Space Flight Center (GSFC). The program, which is expected to last 18-24 months, will receive some funding from SEMATECH, and also involve Tinsley Laboratories, a Richmond, CA, developer of optical metrology technology.

Known as the High Precision Optics Joint Sponsored Research Agreement, the pact calls for SVGL to act as system integrator, combining GSFC`s UV mirror coating capabilities, special test facilities, and analytical modeling with its existing manufacturing processes for reflective optics. These optical elements are crucial pieces of the Micrascan family of lithography tools.

NASA is seeking to reduce the cost of advanced optics for its space programs, while SVGL is hoping to improve reproducibility and output capacity, noted Bob Richardson, Silicon Valley Group`s corporate VP for new business development and marketing. "The idea is, working together, we can perfect better ways of manufacturing," he said. "And as we make more, we can make the products more affordable."

In addition to improving polishing techniques and other parameters, Tinsley`s metrology capabilities will be strengthened, said Richardson. "A big part of the process is measurement, and as we advance, the requirements for metrology increase even more. It`s not a large market, so it`s not economically viable for someone to develop tools" without a cooperative program, he explained.

Initial results are expected to emerge within a year, said Richardson. "But the benefits should continue long after

that," he added. SVGL has purchased new factory space in Connecticut for Micrascan production, with plans calling for "rapidly getting to a capacity of a couple hundred units per year," said Richardson. - P.N.D.