CMP automation system

05/01/1997

CMP automation system

Using a 6-axis, track-guided robot, CMP Autoload automates material transport, handling, and scheduling among polishing and cleaning equipment within a CMP or planarization work cell, eliminating the need for operators within the cell. Designed for Class 1 cleanroom environments, the system has performed at >99% uptime during in-fab operation. Tool downtime can be reduced and cell throughput increased because CMP Autoload ensures that material is continually rotated among polishers and cleaners. The system is compatible with polishing and cleaning equipment from all major vendors. It can interface with a cell`s operator I/O port or with a fab`s interbay automation systems, and it can handle 150- or 200-mm cassettes and SMIF pods. PRI Automation Inc., Billerica, MA; ph 508/663-8555, fax 508/663-9755.