ASML and IMEC to train work force

04/01/1997

ASML and IMEC to train work force

To address the critical shortage of technical personnel trained in deep UV lithography, stepper manufacturer ASM Lithography and Belgian R&D organization IMEC have formed a strategic alliance to train the work force that will be needed to operate and maintain 0.25 micron fabs using DUV lithography.

The training courses will provide up to five weeks of work with ASML steppers. IMEC`s current installed base includes ASML`s PAS 5500/90 and PAS 5000/70 DUV steppers, as well as advanced i-line steppers. The alliance also plans to install one of the new PAS 5500/300 DUV steppers. In the future, ASML and IMEC, partners in DUV lithography for more than seven years, may expand the training venture to include other technologies, such as 193-nm wavelength and advanced i-line techniques.