Letters to the editor

04/01/1997

Dielectrics article

I am a new reader of Solid State Technology and I found the article, "Slow traps studied in MOS dielectrics" in the Technology News section (p. 56, November 1996), very interesting. Could you give me the address of the research group working at Griffith University in Australia.

M. de Murcia

Thank you for your interest. The information I used for the article was provided by Philip Tanner et al. Mr. Tanner can be reached at: School of Microelectronic Engineering, Griffith University, Nathan, Queensland 4111, Australia; e-mail [email protected]. I`m sure he would be happy to hear from you.-M.Y.M.L.

SST covers future issues

I liked the article on vacuum robotics ("Design challenges in vacuum robotics," October 1996, p. 62) since this subject is the future of the industry.

Zhi Quan Chen

Q-Lab, Princeton, NJ

Praise for departments

The EuroFocus section catches my attention. I especially enjoyed July`s article "Sicilian volcano fab is only part of ST`s aggressive expansion," (p.70).

Dr. R.P. Wellinger, president

Mutron, Boudry, Switzerland

The World News section provides excellent projections of book-to-bill effects on support industries.

Ronald Keukelaar, engineering manager

Rek Consultants, San Carlos, CA

Your magazine is very informative on new processes and products vital to the semiconductor industry.

Trevor D. Morgan, engineer

Novellus Systems Inc., Austin, TX

The Product Guide Plus, distributed at SEMICON/West, features an excellent compilation and showcase of useful products.

Prasad Gadgil, Process Engineer

Genus Inc., Sunnyvale, CA

Clarifications

In the New Products section (November 1996), we featured high-purity Teflon tubing manufactured by Western Technical Products Inc. "Teflon" is a registered trademark of the DuPont Company. Western Technical Products Inc. has no affiliation with DuPont Co.

In "New approaches to simulation-assisted design and process development" (March 1997, p. S16), the colors in Fig. 3 were inadvertently printed in gray scale.

The correct colors are noted below.