Linewidth and overlay measurement

04/01/1997

Linewidth and overlay measurement

This linewidth and overlay measurement tool, the LWS3000, is a video-based system with image processing capabilities. It has wafer inspection and defect review options for process monitoring, a statistical process control software option, and confocal capabilities for inspection of geometries as small as 0.25 ?m. An integrated robot handling system provides automatic wafer handling of 100- to 200-mm wafers. The operating software is Windows-based and designed for easy job setups, calibration, and fully automatic measurement capabilities. Output formats and statistical analysis routines are customizable, based on specific applications. Leica Mikroskopie und Systeme GmbH, Wetzlar, Germany; ph 49/6441-292272, fax 49/6441-292339