Multisurface recticle inspection

04/01/1997

Multisurface reticle inspection

The STARlight inspection system is used to detect contamination defects on the patterned chrome surface of a photomask. URSA (unpatterned reticle surface analysis), a product extension for STARlight, inspects the pellicles and unpatterned glass surfaces of the reticle for contaminants and imperfections. This single-step system reduces cycle time and lowers the risk of contamination from excessive handling. KLA Instruments Corp., San Jose, CA; ph 408/468-5334, e-mail [email protected], URL http://www.kla.com.