Etch chamber parts

04/01/1997

Etch chamber parts

These Vespel polyimide etch-chamber parts, including clamp rings, screws, and covers, are produced with a five-step cleaning process that results in very low particle generation and long life. Enhanced designs speed the installation process. This company also offers a clamp ring recycling program for Applied Materials` P5000 tool users, reducing the cost of spare parts. M.E.C. Technology Inc., Toms River, NJ; ph 908/505-0308, fax 908/505-2151.