PLD multitarget manipulator

04/01/1997

PLD multitarget manipulators

Designed for use in pulsed laser deposition systems, these multiple-target manipulators are valuable tools for depositing multiple-layer films. They can be configured for as many as six 1-in.-dia. targets or four 3-in. targets. A coaxial, magnetically coupled, rotary feedthrough avoids the failure problems associated with bellows seals in demanding environments. A water-cooled shield protects all targets from backscattered vapor. Computer automation is optional. PVD Products, Bedford, MA; ph 617/275-9959, fax 617/275-3709.