Pattern recognition with auto handling

04/01/1997

Pattern recognition with auto handling

This fully automatic analytical probing system incorporates an automatic wafer handler with pattern recognition for use in test and device characterization labs, and wafer-level reliability and just-off-line applications. The system allowseither operator interaction or full automation of such functions as wafer loading/unloading from cassettes to chuck, aligning/correcting for position, stepping through die test routines, and storing location and measurement results - while retaining low-noise probing. The cassette-to-chuck-to-cassette wafer handling minimizes the chance of sample contamination and breakage, while assuring higher throughput with automated sorting. This probing capability is available with the 6600 and 8800 series of probe stations, equipped with ambient, triaxial, or thermal chucks and pcProbe probing control software. Options include integrated dry and shielded environments and light-tight enclosures with failsafe interlock provision to prevent loading/unloading of the wafer under improper conditions. The Micromanipulator Co. Inc., Carson City, NV; ph 702/882-2400, fax 702/882-7694, e-mail [email protected].