Lambda Physik wins SEMATECH award

03/01/1997

Lambda Physik wins SEMATECH award

Lambda Physik, G?ttingen, Germany, a producer of excimer lasers, received the SEMATECH Outstanding Contribution Award 1996 for its 193-nm Optical Materials Damage Assessment Project.

The project involves the study of optical materials in the areas of damage mechanisms, and damage and lens heating effects on image quality. The goals of the project are to evaluate optical materials, facilitate improvements, and define applicability for 193-nm optics.

To facilitate these studies, Lambda Physik`s ArF excimer lasers were applied in SEMATECH`s lifetime test facility at MIT/Lincoln Laboratory in Lexington, MA, and at the University of California, Berkeley. The lasers feature up to 400-Hz repetition rate and output powers of several 10s of W. - L.S.